High Lateral Resolution, Long Working Distance Viewing Optics for UHV Chambers

Photo of long working distance viewing micrscope

In surface analysis, it is extremely helpful to view the sample optically to assist in navigation and to determine the correct location for subsequent analysis. Kore has developed a viewing system with the following capabilities:

Zoom from ~3mm field of view to 400�m field of view.
High lateral optical resolution at high magnification (<5�m).
A long working distance of 175 mm ideally suited to UHV stainless steel chambers where it is not always possible to locate a camera near to the sample.
Mounting onto a 70mm OD CF window.
A colour camera mounted on the microscope.
Monitor display.
Image capture with a suitable image capture board.
Cold, dichroic halogen illuminator mounted on a 70mm OD CF window with power supply.

Please click on the thumbnail sketch to view a larger schematic with dimensions (in PDF format for easy zooming).

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Last updated: 17:08 05/02/2014

� Kore Technology Limited 2014